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sliverstorm
on June 23, 2017
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GlobalFoundries Details 7 nm Plans: Three Generati...
Not knowing for sure, I'd wonder if it's limited by EUV power output. The main challenge has always been, how to produce enough light. Whereas with regular litho, your reticle limit is a function of how expensive the lens is.
deepnotderp
on June 23, 2017
[–]
Definitely, I think this is the issue. You're definitely right that the problem with EUV is how to get a strong enough power source.
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